Semiconductor

Truck/Tank Unloading

Due to increasing demand for chemicals, more and more chemicals are being delivered in tankers. Almatec® FUTUR Series AODD Pumps offer an ideal way to transfer the chemicals safely and quickly from the truck to the storage tanks under the same purity requirements as for the supply of the machining tools. The same systems are also suitable for all other transfer operations and guarantee the high purity of the chemicals.

For these applications, Almatec FUTUR Pumps of the larger 50 and 100 series are particularly recommended.

Filter Press

Part of the wastewater-treatment process involves the removal of bound pollutants and solids with filter presses often used in this application.

Since higher pressures are required for these applications, Almatec® AHD or AHS Series pumps, which can be used with delivery pressures of up to 15 bar (218 psi), are a recommended solution. The simple and compact design of these pumps, as well as their need for minimal maintenance help ensure reliable use.

Chillers

As the behind-the-scenes workhorse in every semiconductor plant, chillers play a vital role in the manufacturing process. From preventing expensive equipment from overheating to cooling valuable wafers, chillers need to be continuously operating effectively without any doubt.

Malema Flow Switches are used throughout the chillers piping flow path to indicate the presence of liquid flow. They can be programmed to trip an alarm to immediately notify operators when flow has stopped, enabling safeguards to protect your process. For metering solutions Malema offers both paddlewheel and Vortex Flow Meters to manage flow to and from the chillers.

Slurry Management

Slurry is a vital part of any chip manufacturing process and ensuring that this valuable chemistry is managed correctly is a top priority with many facets. Metering proper dosing of chemicals to slurry mixing tanks and managing the slurry in day tanks and loop piping requires high purity technologies that provides corrosion resistance and ensures chemical inertness.

With three different flow meter technologies – Coriolis, Ultrasonic, or Vortex – Malema offers full portfolio of PFA flow meters for managing slurry. Each technology offers precision measurements to ensure accuracy in slurry batch mixing and manage usage. Additionally, the Coriolis Flow Meter offers the additional benefit of measuring foamy liquids that can be found in slurry mixes.

Chemical Mechanical Planarization

Chemical Mechanical Planarization (CMP) is the heart of the semiconductor chip manufacturing process. In a process where everything is closely monitored to ensure accuracy and prevent waste, having the right control equipment in the CMP process is vital. Making sure you have the exact amount of slurry dispensed at the right time prevents the wafers from being over or under polished leading to defects.

Extreme accuracy in controlling the flow of slurry will prevent waste by conserving valuable slurry, reducing defective wafers. Malema PFA Coriolis and Ultrasonic Flow Controllers offer an extremely high level of accuracy to precisely manage your slurry dispensing process.

Additionally, Malema offers other flow control technologies like pressure sensors and the MIID Interlock Device, an innovative valve leak prevention tool the prevents cross contamination between slurry and DI water.

Lithography

Lithography can be broken down into the following steps: dispensing of Photoresist, Exposing, Developing and Etching. The repetition of these steps helps transform the wafer into a chip.

Malema Ultrasonic Flow Meters with PFA wetted parts provide precision flow control for small diameter photoresist dispense applications. These flow meters provide high purity metering while being corrosion resistant.

Etch

Dry & Wet Etch process goes hand in hand with the lithography process to remove unmasked sections from the wafer.

By eliminating wasteful chemical use and improving product yield the Malema MDM-3000 Ultrasonic Dispense Verification provides a controlled way to dispense chemicals during the etching process. High purity flow switches made from PFA or PTFE provide a chemically inert way to monitor flow, while being resistant to harsh abrasive chemicals.