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Wherever safe, accurate, and repeatable flow control and measurement are required, you can find Malema solutions.

For over 40 years, Malema flow meters, flow controllers, flow switches, relief valves and pressure sensors have been utilized across various demanding applications. They offer high-purity performance in semiconductor production, safety in dangerous industrial environments and precision in hydrogen transportation applications.

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CPFM-8800 SERIES CORIOLIS MASS FLOW METERS Extremely Accurate Coriolis Mass Flow Meter With Separate Units for Sensor and Electronics

Providing mass flow rate, total mass and temperature with accuracy ±1% of reading, the CPFM-8800 Series Mass Coriolis Flow Meter Series by Malema offers a line of highly accurate flow meter solutions designed for use in semiconductor and other high-purity industrial applications.

CPFM-8800 Flow Meters are comprised of two assemblies: one containing the sensor and the other containing the supporting electronics, allowing for remote sensor electronics. The sensor is fabricated exclusively from PFA (Perfluoroalkoxy) polymeric material, which provides all PFA-wetted surfaces to meet application requirements. With patented Coriolis flow meter technology, the CPFM-8800 Flow Meter offers superior performance in all operating conditions. This Malema Coriolis Flow Meter is used in a wide variety of high-purity semiconductor applications, including DI water, harsh chemicals, and CMP polishing slurries.

Designed with either 1/4” or 3/8” port sizes, the CPFM-8800 Coriolis Flow Meter has two models with flow rate ranges of 50 to 1,500 grams per minute and 150 to 4,000 grams per minute, respectively. These flow rates can be achieved within 1% accuracy of the set point.

Features

  • Fluid measurement performance is independent of fluid properties; eliminating the need to calibrate on different fluids
  • Accuracy unaffected by flow regime (e.g., laminar or turbulent flow) or variations in flow velocity profile
  • Sensors operate and measure in two-phase flow conditions with gas volumetric void fractions in excess of 30%
  • High accuracy - controls flow rate to within ± 1% of reading; ideal for fluid blending and/or dispense applications and reduces chemical consumption
  • Flow measurement performance is independent of fluid properties; eliminating the need to calibrate on different fluids
  • Accuracy unaffected by flow regime (e.g., laminar or turbulent flow) or variations in flow velocity profile
  • Sensors operate and measure in two-phase flow conditions with gas volumetric void fractions in excess of 30%
  • All Perfluoroalkoxy (PFA) wetted part construction – ensures compatibility with UHP liquid chemicals, and DI water
  • Patented Coriolis technology, offering the only plastic Coriolis flow controller in the market
     

Specifications

Product Specifications

FLUID TYPE
  • Liquids
  • Slurry
SIZES OFFERED
  • 1/4"
  • 3/8"
ACCURACY
  • ± 1% of reading
WETTED PARTS, BODY/TUBE
  • PFA/PFA

Measurement Specifications

Set Point Accuracy
± 1% of rate (flow rates between 100-10% of MRV)
± 1% of rate ± Z.O.S. (flow rates below 10% of MRV)
Temperature
Ambient: 0-50°C
Fluid: 18-50°C*
Maximum Operating Pressure 80 psig

* Consult factory for higher temperature applications

  Measurement Range Zero Offset Stability
(Z.O.S.)
Minimum Range Value Maximum Range Value
8803-1 50 g/min 1500 g/min 2 g/min
8803-2 150 g/min 4000 g/min 3 g/min

Electrical Specifications

Supply Voltage 24 VDC ± 10%
Power Consumption Max 6 W
Programming Operate parameter configuration through USB interface with a PC
Output Interfaces 4 - 20 mA Current Loop, Digital I/O
Analog Output Module 4 - 20 mA Current Loop, 500 Ohms max load
Digital Input/Output Module Configurable as Frequency or Digital I/O
Frequency Output 0 - 10 kHz proportional to flow rate

Physical Specifications

Process Connections 1/4" or 3/8" tube connection*
Wetted Material Daikin 211 SH (Similar to Perfluoroalkoxy (PFA) 440)
Sensor Dimensions Mini option: 104 mm (L) x 40 mm (W) x 204 mm (H)
Transmitter Dimension Display option: 155 mm (L) x 50 mm (W) x 179 mm (H)
Weight Sensor: 0.72 kg; Transmitter: 0.65 kg
Cable Length Standard 3 m, Maximum up to 30 m (cable length between sensor and electronics assemblies)
* Consult factory for other types of process connection requirements.

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