M-2111 Ultrasonic Flow Meter High Purity Ultrasonic Flow Meter With U- or Z-Shaped PFA Tube and Signal Converter

The Malema M-2111 Series Ultrasonic Flow Meter, consisting of a flow detector and a signal converter, handles a wide range of flow rates and connection sizes. All wetted parts are made of high-purity PFA and there are no mechanical seals or moving parts. The flow detector has non-contact transducers and a flow tube design without dead pockets.

The M-2111 Ultrasonic Flow Meter is an ideal choice in the semiconductor industry where extreme cleanliness and anti-corrosiveness are required.

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Features

  • Accuracy ±1% of reading
  • Repeatability ±0.5% of reading
  • All wetted parts made of new PFA (AP-211SH)
  • Contamination-free from ions or particles
  • Corrosion resistant, no metal parts
  • Wide rangeability of 100:1 (typical)
  • Easy installation with compact meter body
  • Low flow measurements down to 2 mL/min
  • Measures viscous fluids
  • Ease of parameter configuration through front panel LCD and keypad, or PC communication software

Applications

  • CMP, ECD, Electroless Deposition, Wet Clean and Track tools in semiconductor manufacturing
  • Solar PV equipment
  • Medical Devices
  • Wet process / Chemical distribution systems
  • Laser equipment
  • Cooling systems

Specifications

Operation Specifications

Measurable Fluid Liquids
Speed of Sound in Fluid 1000 to 2200 m/s
Fluid Temperature 10°C - 60°C*
Fluid Pressure 0 to 70 psig
Fluid Kinematic Viscocity 0.8x10-6 m2/s to 4.5x10-5 m2/s**
Process Connection PFA Tube End***
Enclosure Classification IP65

*Consult factory for higher temperature applications
**Consult factory for higher viscocity applications
***Consult factory for other process connections

Material Specifications

Part Name Material
Wetted Part Body PFA
Tube PFA
Housing (Size 10/15/20) PTFE
End Cap (Size 04/06) PP
Cable Fitting PP
Cable Jacket PU

Performance Specifications

Range Code Flow Range (L/min) Connecting Tube Size Accuracy Repetability Pressure Loss Factor (K)
4 0 - 3.0 1/4" or 3/8" ± 5 ml/min below 500 ml/min* ± 1% of reading above 500 ml/min ± 0.5 ml/min below 100 ml/min* ± 0.5% of reading above 100 ml/min 3.04
6 0 - 8.0 3/8" ± 12 ml/min below 1200 ml/min ± 1% of reading above 1200 ml/min ± 3 ml/min below 600 ml/min* ± 0.5% of reading above 600 ml/min 0.0537
10 0 - 20.0 1/2" ± 0.047 l/min below 4.7 l/min ± 1% of reading above 4.7 l/min ± 0.024 l/min below 4.7 l/min ± 0.5% of reading above 4.7 l/min 0.0625
15 0 - 50.0 3/4" ± 0.106 l/min below 10.6 l/min ± 1% of reading above 10.6 l/min ± 0.053 l/min below 10.6 l/min ± 0.5% of reading above 10.6 l/min 0.012
20 0 - 80.0 1" ± 0.188 l/min below 18.8 l/min ± 1% of reading above 18.8 l/min ± 0.094 l/min below 18.8 l/min ± 0.5% of reading above 18.8 l/min 0.00377

Electrical Specifications

Analog Output Current O/P:
Active: 4 to 20 mA (Max. Load < 900 ohms)
Passive: 4 to 20 mA (Max. Load < 1200 ohms @ 30 V max.)
Voltage OP: 0 to 10 Vdc (min. impedance < 10 K)
Pulse Output Open Collector (sinking)/Max. 30 Vdc, 200 mA max.
Pulse (Hz) - 10 KHz max, Configurable
Pulse (Volume) - Pulse weight configurable from 0.1 mL
Digital Output Open Collector / Max. 30 Vdc, 200 mA max.
Two digital outputs configurable for:
Low flow rate/High flow rate/Totalizer greater than/Totalizer less than/Signal Strength less/Positive totalizer pulse
LED Alarm indication
Digital Input Zeroing - Momentarily pull-up to 24Vdc for activation
Totalizer Reset - Contact closure or Vdc pull-up (5 Vdc max)
Power Supply 24 Vdc ± 10%
Power Consumption 3.6W/Approx. 150 mA (Continuous)
Max. 0.25 A, surge Current
Digital Communication Modbus Over RS485

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