Why Almatec® FUTUR and E-Series AODD Pumps Excel in Semiconductor-Manufacturing Operations

by Marc Bleisteiner | Nov 07, 2022

The supply, circulation and filtration of high-purity chemicals, many of which can be toxic or hazardous, the transfer of abrasive slurries and solvents, and the removal and neutralization or reconditioning of wastewater are common applications during the production of semiconductors. Because of their critical nature, the demands that are placed on the pumps that are used to facilitate these liquid-transfer operations are high.

With that in mind, two models of Almatec® air-operated double-diaphragm (AODD) pumps possess the design features and operational benefits and capabilities to excel in the handling of high-purity chemicals and wastewater during the manufacture of semiconductors.

Futur Series

Almatec’s FUTUR Series AODD Pumps feature a design that allows liquids to flow straight through product chambers within the center housing. This design ensures that only one side of housing comes in contact with the liquid, which reduces the number of flow bends to only two, resulting in minimized surface area while eliminating the need for sliding parts in the product chambers, along with O-rings in the wetted area.FUTUR pumps also feature no fastening elements, such as tie rods or lamps, with contactless cascade sealing between the product chambers improving the pump’s structural integrity. All of these design enhancements work to minimize the generation of particulate matter as the pump operates, which makes them ideal for use in high-purity liquid-handling applications.

In the example above, a FUTUR Series 100T model is mounted in a cabinet and used to transfer chemicals to and from storage tanks.

Four models are available for different semiconductor-production applications:

  • FUTUR T: Corrosion resistance and higher tensile strength for handling acids and caustics
  • FUTUR H: For high-temperature applications involving acids and caustics
  • FUTUR E: Abrasion-resistant for handling semiconductor polishing slurries and Chemical Mechanical Planarization (CMP)
  • FUTUR S/SH: Constructed of solid-block 316L stainless steel for use with solvent mixtures and strippers

The features and benefits that help set the FUTUR Series pumps apart include:

  • Compact, simple design with few parts and small footprint
  • Solid-block construction for long-life operation
  • All of the plastic models (FUTUR T, H and E) contain no metal
  • Temperature range up to 200ºC (392ºF)
  • PERSWING P® air-control system requires no lubrication or maintenance
  • Separate pulsation dampener available for all models and sizes; can be retrofitted without disassembling the pump and piping
  • Self-priming and low-shear operation
  • Low operational noise levels
  • ATEX-certified


The E-Series AODD Pumps, which were introduced to the market in 2009, build on the legacy of Almatec’s original A-Series model, which had been recognized as a leading plastic AODD pump since its introduction in 1984. The advancements within the E-Series’ design include an innovative ring-tightening structure; increased flow capacity via an optimized flow pattern; decreased air consumption; reduced noise levels; and a pulsation dampener suitable for flanged connections.

Use of an Almatec E Series in a lifting station for filter flushing

All of these capabilities combine to make E-Series pumps ideal for use as a drain pump in supply applications and a chemical-handling pump in water/wastewater treatment.

The features and benefits of the E-Series pumps include:

  • Solid plastic-block construction in PE/PE conductive or PTFE/PTFE conductive
  • Diaphragms constructed of EPDM, PTFE/EPDM compound, PTFE Modified, NBR or ATEX variations
  • Ball valves constructed of EPDM, PTFE, NBR or stainless steel
  • Self-priming and low-shear operation
  • Housing bolts tightened against a diaphragm-sized ring, which spreads bolt force out and allows higher bolt torques
  • No drives, rotating parts or shaft seals
  • PERSWING P® air-control system requires no lubrication or maintenance
  • Compatible for use in temperatures up to 120ºC (248ºF)
  • Expansion compensation for use in applications with fluctuating temperatures
  • Interchangeability with existing A-Series pumps
  • Certified according to DIN EN ISO 9001:2008 and DIN ISO 14001:2004
  • ATEX certification 

Would you like more information about Almatec semiconductor pumps? We look forward to hearing from you!
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