Semiconductor Fluid Handling Pumps

Truck/Tank Unloading

Due to increasing demand for chemicals, more and more chemicals are being delivered in tankers. Almatec® FUTUR Series AODD Pumps offer an ideal way to transfer the chemicals safely and quickly from the truck to the storage tanks under the same purity requirements as for the supply of the machining tools. The same systems are also suitable for all other transfer operations and guarantee the high purity of the chemicals.

For these applications, Almatec FUTUR pumps of the larger 50 and 100 series are particularly recommended.

Pure Chemical Supply

A reliable chemical supply is the foundation on which all chip production is built. Almatec® pumps are ideally suited for handling all the chemicals needed in modern chip production.

The completely metal-free FUTUR Series pumps are specially designed to transport the most demanding media without shearing and without particle contamination. Common cabinets are often equipped with redundant FUTUR pumps to guarantee a reliable chemical supply.

Almatec E-Series pumps are ideal for use as drain pumps in this application.

Wastewater Treatment

In wastewater treatment, all chemicals used in production are processed after their use to such an extent that they can be discharged into the local wastewater network. For this purpose, all hazardous substances must be separated from the fluid stream and the wastewater neutralized.

Some of the used chemicals are first cooled in a circulation system with the use of heat exchangers before they can be further handled and disposed of. Therefore, for high-temperature requirements of up to 160°C (320°F), FUTUR Series pumps are ideally suited due to their heat-resistance properties.

For further process steps where the temperatures are already lower, E-Series pumps can be used for example, as an end-loading and supply pump.

Filter Press

Part of the wastewater-treatment process involves the removal of bound pollutants and solids with filter presses often used in this application.

Since higher pressures are required for these applications, Almatec® AHD or AHS Series pumps, which can be used with delivery pressures of up to 15 bar (218 psi), are a recommended solution. The simple and compact design of these pumps, as well as their need for minimal maintenance help ensure reliable use.

Waste-gas scrubber

During the production of the chips, toxic vapors and exhaust gases are produced, which must be neutralized in a waste-gas treatment above the cleanrooms.

Waste-gas treatment uses waste-gas scrubbers that produce contaminated water after cleaning the waste gases. Almatec® pumps are well-suited for disposing of this type of wastewater.

Furthermore, they supply the waste-gas scrubbers with the necessary detergents such as lime milk.