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FUTUR - Pumps for the Semiconductor Industry

Designed for chemical supply and circulation for the semiconductor industry

FUTUR

Since 1984 ALMATEC manufactures special pumps for the chemical supply and circulation in the semiconductor industry. The FUTUR series is particularly developed for the special requirements of these applications.

The liquids handled in the semiconductor industry set different demands to the pumps. Therefore the FUTUR series is available in four materials:

  • 4 sizes made of PTFE/PE for acids and caustics up to 130°C/266°F (model FUTUR T)
  • 2 sizes made of PTFE for hot applications with acids and caustics up to 200°C/390°F (model FUTUR H)
  • 2 sizes made of PE for slurries (model FUTUR E)
  • 2 sizes made of SS316L for solvents (models FUTUR S and SH)

The different pump sizes achieve max. capacities between 10 and 100 l/min (2.6 - 26 gpm). For every pump size and material are appropriate pulsation dampers available.

All FUTUR pumps are self-priming pneumatic diaphragm pumps which may run dry. The pumps have a compact, simple design with few parts only. The housing parts are machined from solid blocks, the basis for a long life time. FUTUR pumps are cleaned, assembled, and tested in a clean-room line.

The latest generation of the FUTUR pumps for the semiconductor industry is the FUTUR-Omega series:

  • Entirely made of PTFE
  • New construction with Ω-shaped base frame
  • Diaphragm and center housing with rotation prevention
  • New PTFE material for the diaphragms
  • Three sizes with max. capacities of 20, 50 and 100 l/min (5.3, 13, 26 gpm)
  • Depending on the application, also available entirely made of polyethylene and SS316L

Further features of the FUTUR series at a glance:

  • Four materials (T, H, E, S) for the different applications
  • No metal at all (T, H, E)
  • Temperature range up to 200°C/390°F (H)
  • Patented, contactless cascade sealing between the product chambers
  • No O-ring sealing in wetted areas
  • Straight-through flow pattern, only one wetted housing part
  • Air control system PERSWING P®, no lubrication or maintenance
  • Internal air flow
  • Diaphragms without plates and gaskets, optimized diaphragm geometry
  • Cylinder valves sealing the full area
  • Compact, simple design with few parts, very low space requirement
  • Machined from solid blocks
  • Easy to dismantle and assemble
  • No fixing elements, such as tie rods, nuts, or clamps
  • Separate pulsation damper available for all materials and sizes
  • Diaphragm and/or stroke sensors can be retrofitted easily
  • Low noise level

Please complete our Inquiry sheet and we will immediately send you a quotation for your specific application - or ask for more general Information.

More Information about ALMATEC FUTUR series:

PDF-DokumentTechnical data
PDF-DokumentPerformance range
PDF-DokumentDimensions
PDF-DokumentExploded views
PDF-DokumentSpare part lists
PDF-DokumentManual
PDF-DokumentBrochure (A4)
PDF-DokumentBrochure: Futur S/SH

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